What harm does static electricity do to IC packaging

What harm does static electricity do to IC packaging? First of all, the causes of static electricity are everywhere. With the rapid development of science and technology and high automation of industrial production, the harm of static electricity in industrial production is obvious. It can cause various obstacles, limit the improvement of automation level and affect product quality. This paper combines the actual situation of IC packaging and production process in our factory to explain the reasons for the generation of static electricity, mainly in the following aspects.
1. High resistance materials are mostly used in the construction and decoration of production workshop
The IC production process requires the use of clean workshop or super clean workshop. It is required that the dust particle size should be changed from 0.3 μ m to 0.1 μ m, and the dust particle density is about 353 / m3. Therefore, in addition to the installation of dust collection equipment, inorganic and organic non dust materials should be used to prevent dust. But the electrical properties of building materials are not considered as an index. There is no regulation in the code for design of clean workshop in industrial enterprises. The main interior decoration materials used in the clean workshop of IC factory are: polyurethane elastic floor, nylon, hard plastic, polyethylene, plastic wallpaper, resin, wood, white porcelain plate, enamel, gypsum, etc. Most of the above materials are polymer compounds or insulators. For example, the resistivity of organic glass is 1012-1014 Ω cm, and that of polyethylene is 1013-1015ncm, so the conductivity is relatively poor. For some reason, static electricity is not easy to leak to the earth through them, resulting in the accumulation of static electricity.
2. Human static electricity
Different movements and back and forth of operators in the clean workshop, continuous close contact and separation between the sole of shoes and the ground, and activities and friction of various parts of the human body, whether walking fast or slowly, jogging will produce static electricity, that is, the so-called walking electrification; when the human body stands up after activity, static electricity will also be generated when the working clothes worn by the human body contact with the chair surface. If the static voltage of human body can't be eliminated and the IC chip is contacted, it may cause IC breakdown unconsciously.
3. Static electricity caused by air conditioning and air purification
Since IC production is required to be carried out under the condition of 45-55% RH, air conditioning shall be carried out and air purification shall be carried out at the same time. The dehumidified air shall be sent to the clean room through primary effect filter, medium effect filter, filter and air pipe. Generally, the wind speed of the main air duct is 8 ~ 10m / s, and the inner wall of the air duct is painted. When the dry air and the air duct, the dry air and the filter move relatively, static electricity will be generated. It should be noted that there is a sensitive relationship between static electricity and humidity. In addition, static electricity will be generated during the packaging and transportation of semi-finished products and IC finished products, which is one of the factors for electrostatic electrification.
Secondly, the harm of static electricity to IC is quite great. Generally speaking, static electricity has the characteristics of high potential and strong electric field. In the process of electrostatic electrification and discharge, sometimes transient large current discharge and electromagnetic pulse (EMP) are formed, which produce electromagnetic radiation field with wide spectrum. In addition, compared with conventional electric energy, electrostatic energy is relatively small. In the process of natural electrification discharge, electrostatic discharge (ESD) parameters are uncontrollable, and it is a random process difficult to repeat, so its role is often ignored. Especially in the field of microelectronics technology, its harm to us is amazing. It is reported that the direct economic loss caused by static electricity is up to several hundred million yuan per year. The harm of static electricity has become a major obstacle to the development of microelectronics industry.

In the semiconductor device workshop, the yield of IC, especially VLSI, will be greatly reduced due to the dust adsorbed on the chip. The operators of IC production workshop wear clean work clothes. If the human body has static electricity, it is easy to absorb dust and dirt. If these dust and dirt are brought to the operation site, it will affect the product quality, deteriorate the product performance and greatly reduce the IC yield. If the radius of the dust particles adsorbed is larger than 100 μ m and the width of the line is about 100 μ m, and the thickness of the film is under 50 μ m, the product is easy to be scrapped.
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Software copyright: Registration No. 2018sr552330 of electrostatic protection monitoring system in ningchu production and operation area
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